Table 1 EDX elemental composition and thickness for Ti3Au films doped with Cu and Ag elements
Sample ID | EDX analysis (at%) | Film thickness (nm) | |||
|---|---|---|---|---|---|
Ti | Au | Cu or Ag | Ti:Au ratio | ||
Sstd | 73.3 | 26.7 | - | 2.7 | 915 |
SCu1 | 75.8 | 23.7 | 0.5 | 3.2 | 900 |
SCu2 | 72.2 | 26.6 | 1.2 | 2.7 | 1000 |
SCu3 | 71.8 | 25.0 | 3.2 | 2.9 | 1120 |
SCu4 | 71.2 | 21.7 | 7.1 | 3.3 | 1130 |
SAg1 | 75.7 | 24.1 | 0.2 | 3.1 | 1220 |
SAg2 | 74.8 | 23.9 | 1.3 | 3.1 | 1070 |
SAg3 | 70.9 | 26.3 | 2.8 | 2.7 | 1250 |
SAg4 | 70.7 | 25.0 | 4.2 | 2.8 | 1560 |